Introduction to Microsystem Design [electronic resource] / by Werner Karl Schomburg.

Por: Schomburg, Werner Karl [author.]Colaborador(es): SpringerLink (Online service)Tipo de material: TextoTextoSeries RWTHedition; -1Descripción: XXII, 322 p. online resourceISBN: 9783642194894 99783642194894Tema(s): Engineering | Engineering | APPLIED AND TECHNICAL PHYCICS | OPTICAL AND ELECTRONIC MATERIALS | OPRICAL MATERIALS | NANOTECHNOLOGY AND MICROENGINEERING | CIRCUITS AND SYSTEMS | SYSTEMS ENGINEERINGClasificación CDD: 620.5 Recursos en línea: ir a documento
Contenidos:
Preface -- Notations and symbols -- Introduction -- Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies between physical domains -- Mechanical devices for electronics -- Pressure sensors -- Flow sensors -- Inertial sensors.
Resumen: The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
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Preface -- Notations and symbols -- Introduction -- Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies between physical domains -- Mechanical devices for electronics -- Pressure sensors -- Flow sensors -- Inertial sensors.

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

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