000 04121nam a2200349za04500
001 17763
008 050703s2011 ne eng d
020 _a9789048197019 99789048197019
082 _a620.5
_b223
100 _aOstasevicius, Vytautas.
_eauthor.
_935268
245 _aMicrosystems Dynamics
_h[electronic resource] /
_cby Vytautas Ostasevicius, Rolanas Dauksevicius.
300 _aVIII, 214 p.
_bonline resource.
490 _aIntelligent Systems Control and Automation: Science and Engineering
490 _x-2213-8986 ;
_v-44
505 _aForeword -- Preface -- Introduction to Microsystems -- Fabrication Technologies of Microsystems -- Overview -- Nickel Surface Micromachining Technology for Fabrication of Microswitches -- UV Lithography for Fabrication of Micromotors -- Common MEMS Actuators -- Parallel Plate Capacitors -- Comb Drives -- Electrostatic Micromotors -- Electrostatic Microswitches -- Theoretical Background of Multiphysical Interactions Common in Microsystems -- Introduction to Coupled-Field Modeling -- Electrostatic Actuation and Pull-in Instability -- Viscous Air Damping -- Vibro-Impact Interactions -- Experimental Testing of Microsystem Dynamics -- Vibration Excitation Methods -- Optical Techniques for Measurement of Vibrations of Microstructures -- Study of Elastic Vibro-Impact Macrosystems and Microsystems -- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact -- Macrosystems -- -- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator -- Numerical Modeling and Analysis of Fluidic-Structural Interaction -- Numerical Modeling and Analysis of Electrostatic-Structural Interaction -- Numerical Modeling and Analysis of Vibro-Impact Interaction -- Numerical Analysis of the Micromotor -- Finite Element Modeling of Micromotor -- Modal Analysis -- Micromotor Control -- Analytical Model of a Micromotor -- Basics of Micromotor Geometry -- Torque Analysis -- Micromotor Design Guidelines -- References.
520 _aIn recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.
650 _aEngineering.
_996
650 _91099
_aMATERIALS
650 _aEngineering.
_996
650 _91101
_aSTRUCTURAL MECHANICS
650 _933558
_aCONTINUUM MECHANICS AND MECHANICS OF MATERIALS
650 _934385
_aNANOTECHNOLOGY AND MICROENGINEERING
650 _933547
_aMECHANICAL ENGINEERING
650 _933763
_aCOMPUTATIONAL INTELIGENCE
650 _933559
_aENGINEERING DESIGN
650 _935270
_aENGINEETING DESING
700 _aDauksevicius, Rolanas.
_935271
700 _eauthor.
_935272
710 _aSpringerLink (Online service)
_9111
856 _uhttp://springer.escuelaing.metaproxy.org/book/10.1007/978-90-481-9701-9
_yir a documento
_qURL
942 _2ddc
_cCF
999 _c14385
_d14385